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280085 UE MA-ERD-17.2 Field emission scanning electron microscopy and ion beam applications (PI) (2019W)

Continuous assessment of course work


Note: The time of your registration within the registration period has no effect on the allocation of places (no first come, first served).


max. 10 participants
Language: German, English


Classes (iCal) - next class is marked with N

block course: course date 17.2. - 24.2.2020

theory part (both groups):
Mon 17. Feb. 2020, 9:30 - 12:00 and 13:15 - 14:30, room 2C193

practical part:
Group 1
Tue 18.02.2020, 9:15 – 12:30; 13:30 - 16:45; room 2U120
Wed 19.02.2020, 9:15 – 12:30; 13:30 - 16:45; room 2U120
Thu 20.02.2020, 9:15 – 12:30; room 2U120

Group 2
Thu 20.02.2020, 13:30 - 16:45; room 2U120
Fr 21.02.2020, 9:15 – 12:30; 13:30 - 16:45; room 2U120
Mon 24.02.2020, 9:15 – 12:30; 13:30 - 16:45; room 2U120

Monday 21.10. 15:45 - 16:30 Seminarraum Paläontologie 2B311 3.OG UZA II (Kickoff Class)


Aims, contents and method of the course

Students are able to operate the FIB-SEM instrument for electron imaging at high spatial resolution and for FIB applications. They know the special instrumental features of the FIB-SEM instrument in theory and practice. The students learn to collect electron optical images using different detectors (SED, BSED, FSD, STEM) and to perform cross-sections using FIB. Furthermore, the students are introduced to the analytical basics of EBSD- and EDX-analysis. They are able to use the different methods of microstructure analysis for working at individual questions in geomaterials research.

theoretical introduction: Special features of the Quanta 3D FEG instrument (E-gun and E-column, FIB, detectors)
practicals at the Quanta 3D FEG instrument: Hardware; Software; sample exchange; Secondary Electron and Back Scattered Electron imaging; STEM imaging; EDX; FIB; Gas injection systems; usage of the micromanipulator; EBSD; FSD

Assessment and permitted materials

Permanent attendance during the practicals is required for a positive certificate.
During the practicals every student independently collects SE- and BSE-images after setting the required electron beam parameters (UE SEM) and generates a cross-section using the focused ion beam (UE FIB).
Assessment criteria: active participation during the practicals (UE SEM, UE FIB); originally composed workflow protocol of the practicals.
Submission of the workflow protocol until 31. March 2020

Minimum requirements and assessment criteria

Permanent attendance during the practicals is required for a positive certificate.
Assessment criteria: Originally composed workflow protocol of the practicals (max 60 scores); UE SEM (max 20 scores); UE FIB (max 20 scores); Total scores for positive degree: maximum 100 scores, minimum 50 scores
Submission of the workflow protocol until 31. March 2020.

Examination topics

practicals: individual work under supervision at the Quanta 3D FEG instrument;
Original composition of a workflow-protocol covering the practical parts UE SEM and UE FIB.

Reading list

Association in the course directory

Last modified: Mo 07.09.2020 15:21